自作CVD装置による炭素繊維表面へのアルミニウムの蒸着

URI http://repository.tsuyama-ct.ac.jp/metadata/317
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Title
自作CVD装置による炭素繊維表面へのアルミニウムの蒸着
Title Alternative
Deposition of Aluminium on the Carbon Fiber with the Manufactured CVD Apparatus
Author
著者 柴田 政勝
著者(別表記) Shibata Masakatsu
著者 西 彰矩
著者(別表記) Nishi Akinori
著者 池田 憲文
著者(別表記) Ikeda Norifumi
著者 小林 邦夫
著者(別表記) Kobayashi Kunio
Abstract

In order to fabricate well wetting and little high temperature brittleness aluminium-carbon fiber complex, we have made the CVD apparatus which does the work of covering PAN base carbon fiber with tri-ethyl-aluminium. Thickness of the deposited film increase with increace of both temperature and time, and is 1.5μm at 673K for four hours. By means of our manufactured CVD apparatus, observed deposition rate 0.35μm/hr at 673K.

Subject
530 Mechanical engineering
Publish Date
1992-02-25
Publication Title
津山工業高等専門学校紀要
Publication Title Alternative
Bulletin of Tsuyama National College of Technology
Volume
29
Start Page
71
End Page
75
ISSN
0287-7066
NCID
AN00149351
Publisher
津山工業高等専門学校
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Contents Type
Departmental Bulletin Paper
language
Japanese
File Version
publisher