銀蒸着薄膜の密度測定

URI http://repository.tsuyama-ct.ac.jp/metadata/556
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Title
銀蒸着薄膜の密度測定
Title Alternative
A Method of Measurement of the Apparent Density of Evaporated Thin Ag Films
Author
著者 岡田 正
著者(別表記) Okada Tadashi
著者 岸本 俊祐
著者(別表記) Kishimoto Shunsuke
著者 藤田 志郎
著者(別表記) Fujita Shiro
Abstract

In this report, a method for measuring the apparent density of evaporated thin Ag films is described. This measurement is based on the use of a digital thickness monitor and a multiple beam interferometer. The measured values by this method are compared with the values obtained by the weighing method. An empirical formula which expresses the relation between the thickness and the apparent density of evaporated thin films is proposed.

Subject
430 Chemistry
Publish Date
1977-03-15
Publication Title
津山工業高等専門学校紀要
Publication Title Alternative
Bulletin of Tsuyama National College of Technology
Volume
14
Start Page
83
End Page
87
ISSN
0287-7066
NCID
AN00149351
Publisher
津山工業高等専門学校
Official URL
Contents Type
Departmental Bulletin Paper
language
Japanese
File Version
publisher